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solutions manual Micro and Smart Systems Ananthasuresh Vinoy Gopalakrishnan Aatre

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Table of Contents
Chapter 2 Micro Sensors, Actuators, Systems And Smart Materials: An Overview

Chapter 3 Micromachining Technologies

Chapter 4 Mechanics Of Slender Solids In Microsystems

Chapter 5 Finite Element Method

Chapter 6 Modeling Of Coupled Electromechanical Systems

Chapter 7 Electronics Circuits And Control For Micro And Smart Systems

Chapter 8 Integration Of Micro And Smart Systems

Chapter 9 Scaling Effects In Microsystems

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